Wet Process Monitoring/Control

As Integrated circuits shrink and increase in complexity, manufacturing processes become more critical, HORIBA continues to research and develop products to monitor and control various aspects of the wet processing to ensure wafer quality. With its renowned measuring equipment technology, HORIBA offers superior instruments for rigorous quality checks at every stage of the Semiconductor, Flat Panel Display and Photo Voltaic wet processing. HORIBA `s know-how provides for extremely precise and accurate results, in keeping with the company’s comprehensive commitment to quality.

Utilities

Carbon Sensor Resistivity Meter HE-960R-GC
2-Channel Resistivity Meter HE-960RW-GC
Highly Sensitive Silica Monitor SLIA-300
Dissolved Oxygen Monitor SD-300

Chemical Concentration Monitoring

Chemical Solution Concentration Monitor
SC-1 Monitor, CS-131
BHF Concentration Monitor, CS-137
TMAH/H2O2 Monitor, CS-139E
SPM Monitor, CS-150
SC-2 Concentration Monitor, CS-152
FPM Monitor, CS-153
HF/HNO3 Monitor, CS-153N
Hydrofluoric Acid Monitor CM-200A/210A
HF / HCl Concentration Monitor HF-960H