Comprehensive Particle Detection for Semiconductor and FPD Manufacturing Processes :

HORIBA’s PD Series is focused toward providing the particle detection support required for next-generation semiconductor and FPD manufacturing processes. The PD Series’ great versatility, based on its outstanding detection capabilities, makes it ideal for handling mask production as well as exposure and wafer manufacturing processes.
Complementing HORIBA’s HAZE-resistant monitors, the PD line-up offers models specifically for leading-edge masking processes plus compact, low-cost models. In addition, the range has now been enhanced with the introduction of new particle removal systems.

Reticle / Mask Particle Detection System, PR-PD2HR
Reticle/Mask Particle Detection System, PR-PD2
Reticle/Mask Particle Detection System, PR-PD3
Reticle / Mask Particle Detection System, PR-PD5 - Compact, low cost reticle / mask particle detection system.
Reticle/Mask Particle Remover RP-1