LIQUID AND VAPOR DELIVERY :

As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and there are now a larger variety of liquid sources used in the semiconductor, FPD and PV manufacturing processes.
HORIBASTEC is the clear world leader in this area offering a full line up liquid flow control and liquid source vaporization and control systems. Different vaporizing methodologies are available for the different precursors , these include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up offering uninterrupted, safe and reliable delivery of liquid precursors increasing uptime and reducing operator handling and risk of process contamination.

Digital Liquid Mass Flow Meters / Controllers
Mixed Injection System Liquid Vaporizers
Direct Liquid Injection System
Liquid source vaporization systems TL series
Compact Baking System LSC series
Liquid Auto Refill System