Horiba | The Shavo Group

Direct Injection Vaporizers

As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and there are now a larger variety of liquid sources used in the semiconductor, FPD and PV manufacturing processes. HORIBASTEC is the clear world leader in this area offering a full line up liquid flow control and liquid source...

Automatic Spectroscopic Ellipsometers

Production processes are evolving rapidly which is reflected in a growing need for high-grade evaluation and analysis of a wide range of thin films and complex multilayer structures. HORIBA systems are capable of measuring film properties including stress, thickness and optical constants of complex and multilayer films and ultra-thin SiO2...

In-line Chemical Solution Concentration Monitors

As Integrated circuits shrink and increase in complexity, manufacturing processes become more critical, HORIBA continues to research and develop products to monitor and control various aspects of the wet processing to ensure wafer quality. With its renowned measuring equipment technology, HORIBA offers superior instruments for rigorous quality checks at...

Reticle/Mask Particle Detection Systems

HORIBA’s PD Series is focused toward providing the particle detection support required for next-generation semiconductor and FPD manufacturing processes. The PD Series’ great versatility, based on its outstanding detection capabilities, makes it ideal for handling mask production as well as exposure and wafer manufacturing...

High Performance Mass Flow Controllers

As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and new materials are being introduced into the wafer production process to increase production efficiency. HORIBASTEC is the recognized leader in mass flow technology, performing extensive research and development bringing the...